High precision trace humidity measurements with a fibre-coupled diode laser absorption spectrometer at atmospheric pressure

摘要

Laser absorption spectroscopy offers the potential for fast and precise trace moisture detection in gases at atmospheric pressure with a small cross sensitivity towards other molecules. We report on the development and calibration of a fibre-coupled tunable diode laser absorption spectrometer operating in the 1-100 ppm humidity range. The spectrometer was tested at three European humidity standards laboratories. The performance of the spectrometer was characterized by monitoring constant water vapour concentrations over several hours, yielding a good long-term stability, reproducibility and accuracy. The standard deviations of the measured water vapour concentrations for values above 5 ppm were below ±2%. Comparisons of the instrument with chilled mirror hygrometers demonstrated its fast response time. The dependences of the signal upon the flow rate and temperature are discussed.