Length measurement by a two-colour interferometer using two close wavelengths to reduce errors caused by air turbulence

摘要

An improved two-colour interferometer for length measurements was developed to reduce both the errors caused by air turbulence and the effects of chromatic aberration in the optical system. The method combines a fringe-counting technique and aphase-measurement technique. The phases of interference fringes with respect to laser wavelength λ{sub}1 and synthetic wavelength λ{sub}s are detected simultaneously by only one detector by using a band-pass filter technique. We verified this new method by measuring lengths of up to 2 m and then comparing the results with those measured by an HP 5528 interferometer. The comparison shows that the relative accuracy of this improved method is 5×10{sup}(-7).