AFM observation and application of diamond-like carbon films

摘要

The surface morphologies of pulsed laser deposited thick diamond-like carbon films were studied by optical microscopy and atomic force microscopy. The thick films had a much larger density of particulates and a much rougher surface than thin films. As a protective coating, a thin film was deposited on porous silicon. Two peaks (708 nm and 768 nm) were suppressed greatly while the peak 646 nm was not. The reason for these changes was discussed. [References: 8]