Characteristics of Y1-xCaxBa2Cu3O7-delta thin films grown by DC magnetron sputtering

摘要

Epitaxial Y1-xCaxBa2Cu3O7-delta thin films were successfully prepared by dc magnetron sputtering. The optimal deposition condition was determined. We find that the superconducting transition temperature T of thin films can be easily adjusted by annealing them in oxygen atmosphere with different pressures. Parabola curves are found for both Tc versus carrier concentration and Tc versus annealing pressure relations.