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Analysis of nonlinear acoustoelastic effect of surface acoustic waves in laminated structures by transfer matrix method

机译:传递矩阵法分析层合结构中表面声波的非线性声弹效应

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摘要

The propagation of surface acoustic waves in a layered half-space is investigated in this paper, where a thin cubic Ge film is perfectly bonded to an isotropic elastic Si half-space. Application of the transfer matrix and by solving the coupled field equations, solutions to the mechanical displacements are obtained for the film and elastic substrate, respectively. The phase velocity equations for surface acoustic waves are obtained. Effects of the homogeneous initial stresses induced by the mismatch of the film and substrate are discussed in detail. The results are useful for the design of acoustic surface wave devices. (C) 2004 Elsevier Ltd. All rights reserved.
机译:本文研究了表面声波在分层半空间中的传播,其中薄立方Ge薄膜完美地结合到各向同性弹性Si半空间。应用转移矩阵并通过求解耦合场方程,分别获得薄膜和弹性基底的机械位移解。得到了声表面波的相速度方程。详细讨论了由膜和基底的不匹配引起的均匀初始应力的影响。结果对于声表面波装置的设计是有用的。 (C)2004 Elsevier Ltd.保留所有权利。

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