Thermoelastic coupling effect on a micro-machined beam resonator

摘要

In this paper, the effect of thermoelastic coupling on a micro-machined resonator is studied. The calculated results show that the frequency shift ratio caused by thermoelastic coupling is of the order of 10(-3), which is much larger than that of air-damping. Furthermore, the non-dimensional frequency is scale-dependent with thermoelastic coupling being considered. In contrast, the non-dimensional frequency only depends upon the ratio of thickness to length when the themoelastic coupling effect is disregarded. (C) 2003 Elsevier Ltd. All rights reserved. [References: 6]