1.55-μm surface-illuminated monolithically integrated balanced metal-semiconductor-metal photodetectors and coplanar waveguide

摘要

Two metal-semiconductor-metal (MSM) photodetectors are integrated monolithically with a coplanar wave guide transmission line to form a 1.55-μm surface-illuminated balanced photodetector. Illuminating the device with CW and taking the difference, the relative intensity noise (RIN) is suppressed by 9-10 dB. In balanced detection, a 7-dB enhancement in the intermodulation term compared to single detector is achieved.