OPTICAL DESIGN AND PERFORMANCE OF A NOVEL MULTIFUNCTION OPTICAL DEVICE

摘要

This letter presents a novel MEMS-based multifunction-integrated optical device capable of performing as variable optical power splitter (VOPS), optical switch (OS), and variable optical attenuator (VOA). The device manipulates the light with a binary-slope mirror driven by compound electrostatic actuator. The optical models for splitting and attenuating are investigated, respectively. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency in this work. Measurements reveal that the excess loss of the device is less than 3 dB, and the controllable attenuation range is up to 39 dB. Moreover, polarization-dependent loss is less than 0.7 dB.