AIR-GAPPED MICROCOXIAL TRANSMISSION LINE FOR ULTRAWIDE BAND MICROWAVE AND MILLIMETER WAVE ICS

摘要

We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ=10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/ mm) and a low and constant effective permittivity (～1.02) in the frequency range of 0.1-40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications.