DC-50 GHz RF-MEMS SPDT SWITCH FOR HIGH-RELIABILITY APPLICATIONS

摘要

A large band SPDT (single-pole double-throw) switch based on a very advanced RF-MEMS switch technology for redundancy schemes are presented. This device allowed to reach state-of-the-art working bandwidth (DC-50 GHz) and RF performances (IL (Insection loss) < 0.8 dB, isolation > 25 dB, and RL > 20 dB). The 200 mm MEMS technology process has demonstrated a very good stability with very low dispersion (deviations < 0.05 dB for the IL and < 0.6 dB for the isolation over the entire wafer and frequency range). An accurate electrical equivalent circuit, modeling the SPDT in the DC-65 GHz frequency band, has allowed to extract a contact resistance which is as low as 1.4Ω.