AN INTEGRATED COMPACT COPLANAR WAVEGUIDE HIGH-PASS FILTER IMPLEMENTED ON HIGH RESISTIVITY SILICON SUBSTRATE

摘要

In this article, the fabrication of a compact and high performance semi-lumped coplanar waveguide high-pass filter (CPW-HPF) implemented on high resistivity silicon (HRS) substrate is proposed. The design procedure and the equivalent circuit of the proposed semi-lumped CPW-HPF is discussed. The filter structure is simple, and the performances are fairly good. This designed filter at cutoff frequency f_c of 21.6 GHz has very good measured characteristics including a balance passband of S_(21) of -0.5±0.3 dB and a sharp band edge rejection. Experimental results of the fabricated filter show a good agreement with the predicted results.