16×16 MIRROR TYPE OPTICAL SWITCH WITH INTEGRATED FIBER ALIGNMENT AND STEADY SWITCHING STATE

摘要

This paper reports a micro electro mechanical system (MEMS) 16×16 free space optical switch based on high-reflectivity mirrors. The mirror monolithically integrated with the fiber grooves can enlarge its rotation angles up to 90°, and keep this as a steady state to steer the optical signal. The reflectivity of the mirror is measured to be 93.1 ～ 96.3%. The smallest fiber-mirror-fiber insertion loss is 2.1 dB by utilizing optiFocus collimating lensed fibers. Moreover, only about ±0.01 dB oscillating amplitude of insertion loss is provoked after the device is tested for 15 min for 5 ～ 90 Hz in the vertical vibration amplitude of 3 mm. In addition, excellent antifatigue performance of the mirror, which can endure more than 10{sup}9 cycles of actuation, has been proven.