Full-Speed Simultaneous EBSD and Spectral Image EDS Analysis of Dual-Phase Steel

摘要

Advances in X-ray microanalysis and backscatter electron diffraction instrumentation and software allow analysts to investigate crystalline materials at ever faster speeds. Using electron microscope chambers with ideal port geometries, where all detectors point at the same area of the tilted sample, it is possible to collect EBSD and EDS data simultaneously with no loss in acquisition performance. The increase in lab efficiency is remarkable. The more information that is collected from the sample, the higher the confidence that the analyst has in the interpretation and characterization. Although collection of EDS elemental maps is useful in this regard, the collection of full spectral imaging data sets is a more modern method that provides much more useful interpretive chemical characterization routines.