Design optimization of linearly DC controlled staggered vertical comb drive actuators

摘要

The nonlinear dependence of the generated torque on the rotation angle in Staggered Vertical Comb Drive actuator represents a real design problem that restrict its linear operation. This paper presents an optimization method that alleviates some of the restrictions of that nonlinearity by exploiting the different behaviors of the torque/angle relationship at different distances from the axis of rotation. The results show that large rotation angles using linear DC actuation is possible using the suggested scheme of a 4-stage staggered vertical comb drive actuator, with maximum allowable angles of up to 22A degrees in both directions and a response that is 62 % more linear.