2D- and 3D-transmission electron microscopy and optical microscopy in powder-based micro components

摘要

Transmission electron microscopy has been rarely used in microsystem technologies so far. Generally, scanning tunnelling microscopy, light microscopy or even cost-intensive tomographic methods are available to ensure high quality standards and control. Nevertheless, a multitude of research projects regarding powders, low filled polymer-nanopowder composites, high filled ceramic or metallic feedstocks for microinjection moulding, green parts or even sintered gearwheels support common explorations very well. In this paper new innovative preparation methods are introduced. The focus lies on a simple idea to create three-dimensional images of microparts by transmission or light microscopy.