Realization and characterization of SU-8 micro cylindrical lenses for in-plane micro optical systems

摘要

This study presents a new method of fabricating and integrating micro cylindrical lenses (MCLs) into an in-plane micro optical system. The characterizations of MCLs, which are made of SU-8 negative photoresist, are also reported in this study. Many demands, especially for arbitrary lens shapes and accurate alignment, can be met by the proposed method. The measurements of size revealed that SU-8 MCLs swelled, but the amount of swelling maintained constant for at least six months. Two factors were demonstrated to govern the swelling of SU-8 structures, and can be compensated for in the design of the mask. The SU-8 MCLs are shown to exhibit function with a satisfactory optical property. Fluorescence is collimated and focused in a micro channel, demonstrating the potential of MCLs to detect laser-induced-fluorescence (LIF). The fluorescence behavior of SU-8 is also examined herein. The advantages of rapid prototyping and easy integration of SU-8 MCLs have a range of many applications, espedaily in in-plane micro optical configurations.