A quantitative analysis of a multi-phase polycrystalline cubic boron nitride tool material using DualEELS

摘要

This paper presents a quantitative analysis of a polycrystalline cubic boron nitride tool material by electron energy-loss spectroscopy spectrum imaging acquired in dual range mode. Having both the low-loss and core-loss regions acquired nearly simultaneously provides the advantage of accurate corrections for thickness effects and thus the possibility to perform quantification calculations. This has resulted in extracted bonding maps with areal (atomsm~2) or volumetric (atomsm~3) densities. Spectroscopic signatures in the low-loss and core-loss energy ranges, of the elements (Al, B, C, N, Ti and O) present in the existing phases, were studied and used when extracting the element specific bonding maps by the multiple linear least squares fitting procedure. Variations of elemental concentrations across the investigated area were determined, despite of phase overlap in the beam direction or energy overlaps in the EELS spectrum. Moreover, the surface oxidation of Ti(C,N) and AlN as well as the amorphisation of α-Al_2O_3 is discussed.