The static expansion system as a new medium vacuum primary standard in KRISS

摘要

A new medium vacuum primary standard using the static expansion method was developed in Korea Research Institute of Standards and Technology. We compared the system with an ultrasonic interferometer manometer using two capacitance diaphragm gauges with full-scale ranges of 133 Pa and 1333 Pa. The results showed that the two standards are coincident with each other within the range of uncertainty at calibrated pressures 3 Pa to 100 Pa.