Comparison of the experimental data and the simulation results of backstreaming effect in the continuous gas expansion vacuum standard

摘要

The backstream from the pumping chamber to the calibration chamber in a continuous gas expansion vacuum standard was determined using an experimental method and the Monte-Carlo (MC) simulation. The results were compared and appeared to be in agreement within 2 X 10~(-5). This supports our opinion that the MC method can be a useful tool in an analysis of vacuum metrological systems. We can also conclude that, in analysis of high vacuum standards, the assumption that the scattering process is described by the cosine law is reasonable.