Reduction of the uncertainty of the PTB vacuum pressure scale by a new large area non-rotating piston gauge

摘要

This paper describes the metrological characterization of a new large area piston gauge (FRS5, Furness Rosenberg Standard) installed at the vacuum metrology laboratory of the Physikalisch-Technische Bundesanstalt (PTB). The operational procedure and the uncertainty budget for pressures between 30 Pa and 11 kPa are given. Comparisons between the FRS5 and a mercury manometer, a rotary piston gauge and a force-balanced piston gauge are described. We show that the reproducibility of the calibration values of capacitance diaphragm gauges is enhanced by a factor of 6 compared with a static expansion primary standard (SE2). Improvements of the SE2 performance by reducing the number of expansions and smaller uncertainties of expansion ratios are discussed.