Electrical characteristics of a small active volume (1 cm3) discharge-pumped XeCl laser

摘要

Through the use of a PFL (pulse-forming line) of conveniently changeable output impedance ZO, the electrical characteristics of a small volume-discharge of standard XeCl laser gas mix was studied. The impedance ZDfrom a 2×0.5×1(=1) cm3discharge was found to be about 10Ω. A PFL of very low impedance is therefore rather inefficient in driving the discharge, because of the impedance mismatch and the slower current rise time. The data presented will be useful for the design of excimer lasers of small discharge volume, which find applications in serving as master oscillator or in high repetition rate operati