Properties of tetrahedral amorphous carbon film by filtered cathodic arc deposition for disk overcoat

摘要

Properties of an amorphous carbon film by Filtered Cathodic Arc (FCA) deposition were studied. It was found that the properties of the film hardly changed by deposition conditions and that nitrogen doping into the film was effective for controlling the film properties. The amount of the sp{sup}3 bonding in the film was decreased with nitrogen content, thus the hardness also decreased. The adhesion of lubricant to the carbon film was improved by nitrogen doping. The films by FCA deposition have high durability and can be expected as ultra thin disk overcoat for the next generation.