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首页> 外文期刊>Materials science in semiconductor processing >The physical properties of nickel doped indium oxide thin film prepared by the sol-gel method and its potential as a humidity sensor
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The physical properties of nickel doped indium oxide thin film prepared by the sol-gel method and its potential as a humidity sensor

机译:溶胶凝胶法制备的镍掺杂氧化铟薄膜的物理性质及其作为湿度传感器的潜力

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Ni doped In2O3 (Ni-x[n(2-x)O(3): x=0.00, 0.02, 0.04, 0.06, 0.08 and 0.10) films have been successfully prepared by a sol-gel method. All films have nanograins, cubic structures and single phase. The Ni un-systematically affected the film thickness and surface roughness. All films showed high transmission percentage i.e. in the range of 92-99% at wavelength more than 380 nm. All films except film with x=0.02 and 0.06 have magnetic properties. It is also found that all of the films were sensitive towards the humidity changes and can be used as a humidity sensor. (C) 2016 Elsevier Ltd. All rights reserved.
机译:已经通过溶胶-凝胶法成功地制备了掺Ni的In 2 O 3(Ni-x [n(2-x)O(3):x = 0.00,0.02、0.04、0.06、0.08和0.10)膜。所有膜均具有纳米颗粒,立方结构和单相。 Ni非系统地影响膜的厚度和表面粗糙度。所有膜均显示出高透射率,即在大于380 nm的波长下处于92-99%的范围内。除了具有x = 0.02和0.06的膜以外的所有膜均具有磁性。还发现所有的膜对湿度变化敏感,可以用作湿度传感器。 (C)2016 Elsevier Ltd.保留所有权利。

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