Preparation and Analysis of Porous Anodic Alumina Template on Silicon Substrate

摘要

Porous anodic alumina (PAA) template is widely used to prepare ordered nanostructure materials. But conventional PAA templates have been restricted for application in micro-electro-mechanical systems (MEMS) technology due to limitations such as shape and brittleness. In this article, a novel process of fabricating alumina porous template based on silicon wafer is described. Porous alumina films were formed by two-step anodization of aluminum layers sputter deposited on silicon wafer. The pore diameters range from 80 to 100nm. The Pilling-Bedworth ratio of Al/Al2O3 was measured and calculated. Thickness of PAA template can be precisely controlled. This research provides an effective tool to nanofabrication in MEMS technology.