Crystallization of amorphous silicon films by rapid thermal annealing for heterojunction photovoltaic solar cells

摘要

Low thermal budget rapid thermal annealing is a promising method of forming highly crystalline silicon thin films on silicon substrates for heterojunction solar cells. In this work, the extent of crystallization was examined by Raman and ultraviolet reflectance spectroscopy, and ellipsometry was used to derive film optical properties. Solar cells were fabricated and analyzed using dark and illuminated current-voltage characteristics, external quantum efficiency, and solar simulator measurements with device efficiency approaching 14%.