Phase Tunable SAW Device on LiNbO_3 Substrate

摘要

The interdigital transducers (IDTs) were fabricated on the surface of the z-cut LiNbO_3 substrates. Top and bottom electrodes are evaporated on the propagation path of surface acoustic wave. In order to investigate the effects of electric field on SAW signal, the measurement in time domain using a network analyzer is carried out, in which, the center frequency of the device is fixed. From the experimental results, it reveals that the phase of signal shifts linearly with the variation of bias voltage. The phase shift of SAW could be controlled by the biased electric field, and thus, the various time delays could be obtained.