Reliability of Ferroelectric Multilayer PZT Thick Films Fabricated by Aerosol Deposition

摘要

Multilayer PZT thick film (approximate to 10m) on Ti-metal substrate fabricated by aerosol deposition (AD) with LaNiO3 (LNO) top and bottom electrode and investigated their dielectric and ferroelectric properties. The film was found to be highly dense and crack free. The ferroelectric fatigue up to 10(9) bipolar switching cycles as well as the thermal shock (-30 degrees C and 90 degrees C) with 30 cycles test revealed no significant change in the remnant polarization, dielectric constant and dielectric loss was observed which shows the reliability of AD film. The temperature dependent dielectric and ferroelectric properties of PZT thick films were discussed in this paper.