PREPARATION OF PZT FINE POWDERS FOR FABRICATING PZT THICK FILMS

摘要

A new process for preparation of PZT fine powder was proposed. By adding acetone and ammonia water to the precursor solution at suitable stages, nanosized powders with minimum agglomeration can be obtained. The effect of these additives on the powder preparation is analyzed according to the principle of the growth dynamics and the agglomeration mechanism of powders. Uniform powders with a perfect perovskite-type PZT phase have been obtained and the size of the powder is in the range of 100-200nm. Pb(Zr_(.40)Ti_(.60))O_3 thick film with 10 mum thickness and excellent properties have been successfully prepared by mixing PZT powders into a PZT sol-gel solution to form a 0/3 ceramic-ceramic composition.