Pyroelectric and Transient Current Properties of Multilayer Pb_(1.1)(Zr_(0.3)Ti_(0.7))O_3/PbTiO_3 and Pb_(1.1)(Zr_(0.3)Ti_(0.7))O_3 Thin Films

摘要

Pb_(1.1)(Zr_(0.30)Ti_(0.70))O_3 (PZT) and Pb_(1.1)(Zr_(0.30)Ti_(0.70))O_3/PbTiO_3 (PZT/PT) multi-layered thin films are grown on Pt/Ti/SiO_2/Si substrate by sol-gel method. The kinetics of current change of pyroelectric and transient response between PZT and PZT/PT ferroelectric thin films is investigated. The shape of peak in the PZT film is sharp, but that of PZT/PT is broadened. An increase in the peak value of switching current and switching time in the PZT/PT film is observed. The change of pyroelectric and transient current between PZT/PT and PZT films is discussed in terms of internal field.