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Electron-beam domain patterning on the nonpolar surfaces of lithium niobate crystals

机译:铌酸锂晶体非极性表面上的电子束畴图形

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We compare electron-beam writing of domains and domain patterns in He-implanted planar optical waveguides fabricated on X-cut LiNbO3 crystals to the results of domain writing on the nonpolar surfaces in unimplanted LiNbO3. The characteristics of written patterns, in particular the exposure dependences of the domain length L and spatial regularity of written domain gratings depend on the relation between the domain depth T-d controlled by the acceleration voltages U, and thickness D of the optical barrier, determined by He-ion beam energy. An increased average L in domain gratings as compared to isolated domains is discussed with account for dependence of the electron emission coefficient sigma on U.
机译:我们将在X切割LiNbO3晶体上制造的He注入平面光波导中的畴和畴图案的电子束写入与未注入LiNbO3的非极性表面上畴写入的结果进行比较。写入图案的特性,特别是畴长L的曝光依赖性和写入畴光栅的空间规律性,取决于由加速电压U控制的畴深Td和由He决定的光学屏障的厚度D之间的关系。离子束能量。考虑到电子发射系数sigma对U的依赖性,讨论了与隔离域相比,域光栅中的平均L增加。

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