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Imaging of Ferroelectric Micro-Domains in X-Cut Lithium Niobate by Confocal Second Harmonic Microscopy

机译:共聚焦二次谐波显微镜成像X-切割铌酸锂中的铁电微区

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摘要

We present results on ferroelectric micro-domains obtained by confocal second harmonic microscopy. The high potential of this technique is demonstrated by imaging periodic ferroelectric domain structures in the surface of planar X-cut lithium niobate (LN) and in the body of ridges fabricated by plasma etching on X-cut LN as well. In both cases the measured second harmonic signal reveals a strong contrast between inverted and non-inverted domain sections. This enabled a depth-resolved non-destructive tomography of micro-domains in ridge structures in all three dimensions.
机译:我们介绍了通过共焦二次谐波显微镜获得的铁电微域的结果。通过在平面X切割铌酸锂(LN)的表面以及通过在X切割LN上进行等离子刻蚀制造的脊体中的周期性铁电畴结构成像,证明了该技术的高潜力。在这两种情况下,测得的二次谐波信号都显示出反相和非反相域之间的强烈对比。这使得能够在所有三个维度上对脊结构中的微域进行深度分辨的非破坏性层析成像。

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