Thermal Oxidation of Gallium Arsenide with Transition Metal Nanolayers on the Surface

摘要

The physicochemical features of the interaction between nanofilms of iron triad metals and the gallium arsenide surface during thermal oxidation are analyzed. The role of oxides formed upon oxidation of iron, cobalt, and nickel metal films in the course of thermal oxidation of gallium arsenide is demonstrated, and the influence of the metal deposition method on the kinetics of oxidation, the composition, and the properties of the prepared samples is determined. Schemes are proposed for the development of the oxidation processes under investigation with due regard for the chemical specific features of the iron triad metals and their compounds.