Influence of Technological Parameters of Nanoporous Al2O3 Layers' Preparation on Their Structural Characteristics

摘要

Layers of nanoporous aluminum oxide (alumina) have been obtained using the electrochemical etching technique by varying technological regimes. The surface morphology and cleavages of obtained experimental samples are studied using scanning electron microscopy (SEM). It is established that with the growth of the anodization temperature, the oxide layer thickness, the diameter of pores, interpore distances, and the porosity increase.