Properties of MTiO3 (M = Sr, Ba) and PbM'O3(M'= Ti, Zr) Superiattice Thin Films Fabricated by Laser Ablation

摘要

BaTiO3/SrTiO3 and PbTiO3/PbZrO3 superiattice thin films were fabricated on Pt/Ti/SiO2/Si substrate by the pulsed laser deposition process. The morphologies and physical properties of deposited films were characterized by using X-ray diffractometer, HR-SEM, and Impedance Analyzer. XRD data and SEM images of the films indicate that each layer was well deposited alternatively in the superiattice structure. The dielectric constant of BaTiO3/SrTiO3 super-lattice thin film was higher than that of individual BaTiO3 or SrTiO3 film. Same result was obtained in the PbTiO3/PbZrO3 system. The dielectric constant of a superiattice film was getting higher as the number of layer is increased.