Synthesis of New Donor-functionalized Alcohols as Organic Ligands for Metal Precursors of Metal Organic Chemical Vapor Deposition

摘要

Recently,the development and use of single precursors for metal organic chemical vapor deposition (MOCVD) has been extensively focused on application to electronic devices.However,systematic design and synthesis of organic ligands appropriate for preparation of metal complexes with relevant chemical and physical properties,such as stability,volatility,and resistance to air and moisture have not received much attention.Generalization to prepare organic ligands for MOCVD precursors is especially important because the large scale synthesis of the metal complexes exclusively depends on the potential usefulness of the ligands.