GROWTH OF DIAMOND-LIKE FILMS ON SUBSTRATES OF DIFFERENT TYPES BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

摘要

Diamond-like carbon films were deposited on substrates made of various materials and having different shapes by plasma-enhanced chemical vapor deposition. The coatings obtained on planar substrates had good adhesion and hardness exceeding 50 GPa. On spherical substrates, films of good quality were obtained only near the vertex (where the substrate and electrode surfaces are parallel to each other). This effect is related to the influence of ion bombardment on the film growth