Synthesis of Heteroleptic Strontium Complexes Containing Substituted Cyclopentadienyl and β-Diketonate Ligands

摘要

The interest in the chemistry and development of strontium precursors for atomic layer deposition (ALD) or chemical vapor deposition (CVD) were driven by several applications such as, SrTiO3 for dynamic random access memories (DRAM), ferroelectrics such as La_xSr_(1-x)TiO3 (BSTO), SrBi2Ta2O9, and SrBi2Nb2O9 for memory devices, high-Tc superconductors such as Bi2Sr2CaCu2O_(8+δ), electroluminescent films such as SrS:Ce, and mixed-electronic ionic conductors such as (La_xSr_(1-x))Mn03, (La_xSr_(1-x))CoC>3 for fuel cell cathodes.