Multilayer Thin-Film Filters of Extreme Ultraviolet and Soft X-raySpectral Regions

B. A. Volodin; S. A. Gusev; M. N. Drozdov; S. Yu. Zuev; E. B. Klyuenkov; A. Ya. Lopatin; V. I. Luchin; A. E. Pestov; N. N. Salashchenko; N. N. Tsybin; N. I. Chkhalo

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Multilayer Thin-Film Filters of Extreme Ultraviolet and Soft X-raySpectral Regions

机译：极紫外和软X射线光谱区域的多层薄膜滤光片

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Multilayer thin-film filters from different material pairs with spectral windows within the wave-length range X < 60 nm were developed. Optical characteristics of samples in the extreme ultraviolet, visible,and IR spectrum ranges were studied. Ultrathin freestanding Zr/Si large-aperture filters with transparenciesup to 76% at X = 13 nm were manufactured for projection lithography test benches; variations in their prop-erties during long-term thermal loads were studied

机译：开发了来自不同材料对的多层薄膜滤光片，其光谱窗口在X <60 nm的波长范围内。研究了样品在极紫外，可见和红外光谱范围内的光学特性。制造用于投影光刻测试台的超薄独立式Zr / Si大孔径滤光片，在X = 13 nm时透明度高达76％。研究了它们在长期热负荷下的性能变化

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《Bulletin of the Russian Academy of Sciences. Physics》 |2010年第1期|共5页
作者
B. A. Volodin; S. A. Gusev; M. N. Drozdov; S. Yu. Zuev; E. B. Klyuenkov; A. Ya. Lopatin; V. I. Luchin; A. E. Pestov; N. N. Salashchenko; N. N. Tsybin; N. I. Chkhalo;
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正文语种 eng
中图分类物理学;
关键词
filters; freestanding; variations;

机译：过滤器;独立式;变化;

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1. Multilayer Thin-Film Filters of Extreme Ultraviolet and Soft X-raySpectral Regions [J] . B. A. Volodin, S. A. Gusev, M. N. Drozdov, Bulletin of the Russian Academy of Sciences. Physics . 2010,第1期

机译：极紫外和软X射线光谱区域的多层薄膜滤光片
2. Extreme-ultraviolet calibration of thin-film Zr filters for the Cosmic Hot Interstellar Plasma Spectrometer [J] . Richelieu Hemphill, Maria G. Pelizzo, Mark Hurwitz Applied optics . 2002,第22期

机译：宇宙热星际等离子体光谱仪的薄膜Zr滤光片的极紫外校准
3. Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range [J] . Nikolay Chkhalo, Alexey Lopatin, Andrey Nechay, Journal of nanoscience and nanotechnology . 2019,第1期

机译：基于铍的多层镜和过滤器，用于极端紫外线范围
4. Laboratory methods for investigations of multilayer mirrors in Extreme Ultraviolet and Soft X-Ray region [C] . M.S. Bibishkin, D.P. Chekhonadskih, N.I. Chkhalo, Society of Photo-Optical Instrumentation Engineers Conference on Micro- and Nanoelectronics . 2004

机译：极端紫外线和软X射线区域中多层镜调查的实验室方法
5. Ultrafast Dynamics of Magnetic Multilayer Films: Magneto-Optical Spectroscopy and Resonant Scattering in the Extreme Ultraviolet and Soft X-Ray Spectral Regions [D] . Zusin, Dmitriy. 2018

机译：磁性多层膜的超快动力学：极紫外和软X射线光谱区域中的磁光光谱和共振散射
6. Thermally stable thin-film filters for high-power extreme-ultraviolet applications [O] . C. Tarrio, R. F. Berg, T. B. Lucatorto, -1

机译：用于大功率极端紫外线应用的热稳定薄膜滤光片
7. Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors [O] . Medvedev, V. V., van den Boogaard, A. J. R., van der Meer, R., 2013

机译：极紫外多层布拉格反射器的红外衍射滤光片
8. Multilayer Reflectors for the Extreme Ultraviolet Spectral Region [R] . Kortright, J. B. 1985

机译：极紫外光谱区域的多层反射器

Multilayer Thin-Film Filters of Extreme Ultraviolet and Soft X-raySpectral Regions

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