Effect of power variation on wettability and optical properties, of co-sputtered titanium and zirconium oxynitride films

摘要

The present paper deals with deposition of titanium and zirconium oxynitride films prepared from co-sputtering titanium and zirconium targets by reactive RF magnetron sputtering. The effect of power variation on various properties of the deposited films is analysed. The film gets transformed from amorphous to well crystalline oxynitride films with gradual increase of target powers as observed from XRD graphs. The films exhibit hydrophilic and hydrophobic behaviours depending upon the presence of various phases. Surface energy decreases as the film properties change from hydrophilic to hydrophobic due to greater contact angle values. The optical properties were measured by UV-Vis-NIR spectrophotometer, transmission spectra and bandgap values show variation with respect to change in elemental composition as determined from EDS analysis.