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Research of Condensate Resistance Measurement Using Single-Contact Substrate

机译:单接触基片测量凝结水电阻的研究

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The research of non-invasive method for condensate resistance measurement uses a substrate with a single-contact area. The novelty of this measurement method lies in the use of electrical current of electrons emitted during the process of electronic emission from an evaporator. Therefore, there is no need of any additional current or voltage source. This study develops a mathematical model describing the performance and dependencies of this method of measurement. The adequacy of this mathematical model was investigated experimentally. For this purpose, the results of direct measurement of substrate condensate resistance were used.
机译:用于凝结水电阻测量的非侵入式方法的研究使用具有单接触面积的基板。这种测量方法的新颖性在于使用从蒸发器发射电子的过程中发射的电子电流。因此,不需要任何额外的电流或电压源。这项研究开发了描述此测量方法的性能和依赖性的数学模型。实验研究了该数学模型的适当性。为此,使用了直接测量基板耐冷凝水性能的结果。

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