A NiFeMo Electroplating Bath for Micromachined Structures

摘要

A number of micromachined magnetic sensors andactuators require materials with desirable magnetic propertiessuch as high permeability and thicknesses in the range of severalmicrometers. Material with appropriate magnetic properties havebeen reported for magnetic storage applications, but often inthickness ranges insufficient for micromachined sensors andactuators. We report the results of an electroplating bath for thedeposition of a high permeability, low coercivity material, aNiFeMo alloy. Using bath, the NiFeMo alloy may beelectrodeposited up to 5μm in thickness. The residual stress ofthe electroplated NiFeMo material remains larger than that forNiFe (Permalloy) electrodeposits.