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Roles and effects of TiN and Pt electrodes in resistive-switching HfO 2 systems

机译:TiN和Pt电极在电阻切换HfO 2系统中的作用和作用

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We investigate the roles of TiN and Pt materials used as electrodes in resistive-switching HfO2 systems. Well-behaved reset operation is observed on condition Pt is used as anode, which together with the strong effect of thin insert layers (IL) indicates that the reset switching is favored at the HfO_2Pt interface. However, switching properties are hampered by yield and reliability issues associated to oxygen runaway at forming operation and caused by the Pt permeability to oxygen. TiNHfO_2(IL)Pt cells show better reliability due to improved oxygen buffering. The non-polar, unipolar and bipolar switching modes are discussed as originating from similar underlying physical mechanisms.
机译:我们研究了TiN和Pt材料在电阻切换HfO2系统中用作电极的作用。在Pt用作阳极的情况下,观察到行为良好的复位操作,再加上薄插入层(IL)的强大作用,表明在HfO_2 Pt界面处有利于进行复位切换。然而,开关性能受到与成型操作时氧气逸散有关并由Pt对氧气的渗透性引起的成品率和可靠性问题所困扰。 TiN HfO_2 (IL) Pt电池由于改善了氧气缓冲性能而显示出更好的可靠性。非极性,单极性和双极性切换模式被讨论为源自相似的基础物理机制。

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