We report on gold/Ba_(0.5)Sr_(0.5)O_3 (BST) ferroelectric thin film C-band tunable bandpass filters (BPFs) designed and fabricated on magnesium oxide substrates using three different structures: microstrip, coplanar waveguide (CPW), and conductor backed coplanar waveguide (CBCPW). The two-pole filters were designed fat a center frequency of 5.89, 5.88, or 5.69 GHz with bandwidths of 3, 9, or 7 percent, respectively. The BST-based CPW filter offers a higher sensitivity parameter as well as a lower loss parameter compared to the BST tunable two-pole microstrip filter and CBCPW filter. With an applied voltage of 40 V, the tuning range for the BPF with CPW structure was determined to be 170 MHz.
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