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Fabrication of Glass-based Microfluidic Devices with Photoresist as Mask

机译:以光刻胶为掩模的玻璃基微流控器件的制备

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摘要

Microfluidic systems have become increasingly well-known in different fields of studies. In recent years many new commercialized microfluidic products have emerged in the market. Microfluidic devices are becoming one of the most dynamic parts of BioMEMS technology. The main applications of microfluidics are medical diagnostics, genetic sequencing, chemistry, drug delivery, and proteomics. Depending on applications and suitability, different types of materials can be used as the substrate for the microfluidic devices such as silicon [1], glass [2, 3], SU-8 [4], polydimethyl-siloxan (PDMS) [5] and Poly methyl methacrylate (PMMA) [6]. However, biocompatibility of the substrate material is very important in vivo and in vitro analyses. Glass as a well-known material with minimum chemical reaction to the body is used in this paper. Due to the low cost and simplicity, commercially available microscopic slides have been used.
机译:在不同的研究领域中,微流体系统已变得越来越众所周知。近年来,市场上出现了许多新的商业化微流体产品。微流体设备正在成为BioMEMS技术中最具活力的部分之一。微流体技术的主要应用是医学诊断,基因测序,化学,药物输送和蛋白质组学。根据应用和适用性,可以将不同类型的材料用作微流体设备的基材,例如硅[1],玻璃[2、3],SU-8 [4],聚二甲基硅氧烷(PDMS)[5]。和聚甲基丙烯酸甲酯(PMMA)[6]。但是,在体内和体外分析中,底物材料的生物相容性非常重要。本文使用玻璃作为众所周知的材料,它对人体的化学反应最小。由于低成本和简单性,已经使用了可商购的显微载玻片。

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