Micromachined silicon attenuated total reflectance infrared spectroscopy: An emerging detection method in microanofluidics

摘要

Microfluidics is an emerging field with various applications. In situ analysis of liquids inside microfluidic channels is an important research subject for any of these applications. On the other hand, attenuated total reflectance infrared spectroscopy (ATR-IR) is a strong surface detection method. Recently, there have been various attempts to use ATR-IR for detection of liquids inside microfluidic channels. Micromachined silicon ATR-IR (μSi-ATR-IR) is an emerging analytical tool for microanofluidics. This paper reviews μSi-ATR-IR microanofluidics detection devices and discusses the application fields, capabilities, advantages, and disadvantages of the method.