A THROUGH-SILICON METROLOGY TARGET FOR SOLID IMMERSION LENSES, PART II: OTHER APPLICATIONS

摘要

The selection and modification of a frontside metrology target for use with solid immersion lenses (SILs) was discussed in Part I of this article in the February issue of EDFA. Resolution criteria and an example application were provided. Other applications of the metrology target, as well as its limitations, are discussed in the following sections.