ISTFA 2011 User's Group 1 - 'FIB'

摘要

The ISFTA 2011 Focused Ion Beam (FIB) User's Group consisted of four invited technical talks, followed by an authors' question-and-answer panel session. Attendance this year was outstanding, with approximately 100 attendees representing industry, suppliers, universities, and national labs. Invited presentations covered a range of research and development of FIB tools/applications, including hardware/methodology improvements by Dave Donnet and novel chemistry developments from Valery Ray. Technical talks also included presentations from Philipp Scholz on novel applications for machining solid immersion lenses in silicon substrate and from Nicholas Antoniou on machining cryogenically cooled samples.