Progress in ion-transport inorganic membranes by novel chemical vapor deposition (CVD) techniques

摘要

Novel metal-organic chemical vapor deposition (MOCVD) techniques using metal beta-diketonate chelates as volatile precursors and some technical modifications, have been developed in the last decade in order to prepare thin films or layers of functional materials, particularly the multi-component ion-transport inorganic membranes. This article gives an overview on the progress in these aspects, mainly based on the research activities at the author's laboratory. (C) 2002 Elsevier Science B.V. All rights reserved. References: 29