Nanocrystalline Diamond Deposited on Mo-Modified Re Substrate by Magnetic Field-Assisted Hot Filament Chemical Vapor Deposition

摘要

A Molybdenum layer with thickness was sputtered on rhenium substrate, High-quality nanodiamond films were deposited on these substrates by hot-filament-assisted chemical vapor deposition assisted with the periodical magnetic field. The nucleation and growth of diamond films were investigated by micro-Raman spectroscopy, scanning electron microscopy, and X-ray diffraction. The nanodiamond nucleation density on the Mo-modified Re substrates was extremely higher than that onto the blank Re substrates. There is the interface 2H-Mo2C layer between diamond film and the molybdenum layer. The value of the parameter a axis and the ratio of c/a of the Mo2C are 3.003 a 1.585, respectively. (C) 2015 The Electrochemical Society. All rights reserved.