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首页> 外文期刊>ECS Journal of Solid State Science and Technology >Formation Behavior of Multi-Layer Oxide Films on Etched Al Foil by Vacuum Infiltration and Anodization
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Formation Behavior of Multi-Layer Oxide Films on Etched Al Foil by Vacuum Infiltration and Anodization

机译:真空浸渗和阳极氧化在铝箔上形成多层氧化膜的行为

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A vacuum infiltration method was proposed to coat uniform zirconia (ZrO2) films on etched aluminum (Al) foil. The formation behavior of the composite oxide films on aluminum (Al) foils with etch pits was different from that of flat Al foils. The multi-layer structures were formed on the ZrO2-coated Al foil after being anodized. The formation mechanism of the multi-layer films on etched Al foils was discussed. The structure and composition of each layer were investigated by scanning electron microscopy and transmission electron microscopy. The multi-layer films consisted of an inner aluminum hydrate layer, middle Al2O3-ZrO2 (Al-Zr) composite layer, and outer Al2O3 layer. Many Al3+ ions passed through the coating layer and transferred into the inner layer. A particle-like and layered structure was observed in the inner layer. The formation of multi-layer films was mainly affected by the volume expansion of the outer Al2O3 layer and the dense middle Al-Zr composite oxide film. The ZrO2 coated foils exhibited 26% higher specific capacitance than foils with only Al2O3 layer when being anodized at 600 V. (C) The Author(s) 2015. Published by ECS. All rights reserved.
机译:提出了一种真空渗透方法,在蚀刻的铝箔上涂覆均匀的氧化锆(ZrO2)膜。具有蚀刻凹坑的铝(Al)箔上的复合氧化物膜的形成行为与平面Al箔不同。在阳极氧化之后,在涂覆有ZrO 2的Al箔上形成多层结构。讨论了铝箔在腐蚀铝箔上的形成机理。通过扫描电子显微镜和透射电子显微镜研究每层的结构和组成。多层膜由内部水合铝层,中间Al2O3-ZrO2(Al-Zr)复合层和外部Al2O3层组成。许多Al3 +离子穿过涂层并转移到内层。在内层中观察到颗粒状和分层的结构。多层膜的形成主要受外部Al2O3层和致密的中间Al-Zr复合氧化物膜体积膨胀的影响。当在600 V电压下进行阳极氧化时,ZrO2涂层的箔比仅具有Al2O3层的箔显示出26%的比电容。(C)作者2015。由ECS发布。版权所有。

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